Course unit contents
This course explores the intersection of Micro-Electro-Mechanical Systems (MEMS) and advanced biomedical imaging. The training focuses on the design, physical modeling, and implementation of micro-scale devices, with a specific emphasis on ultrasound and Terahertz imaging applications for clinical diagnostics.
The program opens with a comprehensive introduction to modern biomedical imaging techniques, establishing the necessary framework to understand how MEMS technology can revolutionize diagnostic applications. A significant portion of the course is dedicated to ultrasound imaging, focusing on the development of microfabricated acoustic transducers. Students will analyze these devices through both circuital modeling and Finite Element Method (FEM) simulations, specifically investigating the complex electro-mechano-acoustic couplings that govern their performance. The curriculum further extends into the emerging field of Terahertz imaging for biological tissues. This section covers the design of specialized MEMS devices and the FEM modeling of microbolometers. In particular, the course examines the thermo-opto-mechanical coupling mechanisms required to enhance the sensitivity and accuracy of thermal-based imaging sensors in the Terahertz spectrum.
Learning goals
By the conclusion of the course, participants will master the fundamental principles of MEMS technology and its strategic role in modern biomedical imaging. Students will develop advanced skills in creating multi-physics models for micro-scale devices, gaining a deep understanding of the complex electro-mechano-acoustic and thermo-opto-mechanical couplings. Furthermore, the course provides the analytical tools necessary to identify and assess the critical figures of merit required to evaluate the performance of MEMS-based systems in clinical imaging applications.
Suggested readings
Brenner, K.; Ergun, A.S.; Firouzi, K.; Rasmussen, M.F.; Stedman, Q.; Khuri–Yakub, B. Advances in Capacitive Micromachined Ultrasonic Transducers. Micromachines 2019, 10, 152. https://doi.org/10.3390/mi10020152
A. Lohfink and P. C. Eccardt, “Linear and nonlinear equivalent circuit modeling of CMUTs,” in IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 52, no. 12, pp. 2163-2172, Dec. 2005. https://doi.org/10.1109/TUFFC.2005.1563260
G. G. Yaralioglu, S. A. Ergun and B. T. Khuri-Yakub, “Finite-element analysis of capacitive micromachined ultrasonic transducers,” in IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 52, no. 12, pp. 2185-2198, Dec. 2005. https://doi.org/10.1109/TUFFC.2005.1563262
Xiang Yang, Xiang Zhao, Ke Yang, Yueping Liu, Yu Liu, Weiling Fu, Yang Luo, Biomedical Applications of Terahertz Spectroscopy and Imaging, Trends in Biotechnology, Volume 34, Issue 10, 2016, Pages 810-824, ISSN 0167-7799. https://doi.org/10.1016/j.tibtech.2016.04.008
– Vicarelli, L.; Tredicucci, A.; Pitanti, A. Micromechanical Bolometers for Subterahertz Detection at Room Temperature, ACS Photonics 2022, 9, 2, 360–367. https://doi.org/10.1021/acsphotonics.1c01273
