Course unit contents
This course explores Micro-Electro-Mechanical Systems (MEMS) for biomedical imaging and their integration into next-generation diagnostic systems, focusing on ultrasound and Terahertz (THz) radiation. The curriculum provides the analytical and methodological tools required to design, model, and characterize MEMS-based transducers for ultrasound imaging and Terahertz imaging for clinical applications.
The course introduces biomedical imaging techniques, describing the primary role of MEMS devices in both traditional and emerging imaging modalities. The program covers MEMS technology, discussing different modeling approaches and describing the microfabrication processes that transform Silicon into 3D resonating microstructures. Proposed MEMS transducers modeling methodologies include analytical models based on linear systems theory, lumped-parameter equivalent circuits, and Finite Element Method (FEM) simulations.
Learning goals
By the end of the course, participants will have acquired a comprehensive understanding of MEMS operating principles in the biomedical field. Students will develop advanced skills in creating circuital models for micro-electro-mechanical resonators, as well as multiphysics FEM models featuring electro-mechano-acoustic and thermos-opto-mechanical coupling. Additionally, attendees will understand the primary figures of merit necessary to evaluate the performance of MEMS-based systems in ultrasound and Terahertz imaging applications.
Suggested readings
Brenner, K.; Ergun, A.S.; Firouzi, K.; Rasmussen, M.F.; Stedman, Q.; Khuri–Yakub, B. Advances in Capacitive Micromachined Ultrasonic Transducers. Micromachines 2019, 10, 152. https://doi.org/10.3390/mi10020152
A. Lohfink and P. C. Eccardt, “Linear and nonlinear equivalent circuit modeling of CMUTs,” in IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 52, no. 12, pp. 2163-2172, Dec. 2005. https://doi.org/10.1109/TUFFC.2005.1563260
G. G. Yaralioglu, S. A. Ergun and B. T. Khuri-Yakub, “Finite-element analysis of capacitive micromachined ultrasonic transducers,” in IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 52, no. 12, pp. 2185-2198, Dec. 2005. https://doi.org/10.1109/TUFFC.2005.1563262
Xiang Yang, Xiang Zhao, Ke Yang, Yueping Liu, Yu Liu, Weiling Fu, Yang Luo, Biomedical Applications of Terahertz Spectroscopy and Imaging, Trends in Biotechnology, Volume 34, Issue 10, 2016, Pages 810-824, ISSN 0167-7799. https://doi.org/10.1016/j.tibtech.2016.04.008
Vicarelli, L.; Tredicucci, A.; Pitanti, A. Micromechanical Bolometers for Subterahertz Detection at Room Temperature, ACS Photonics 2022, 9, 2, 360–367. https://doi.org/10.1021/acsphotonics.1c01273
